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氧化鋅奈米線場效電晶體氣體感測裝置 |
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 專利名稱 |
氧化鋅奈米線場效電晶體氣體感測裝置
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| 專利證書號 |
US 7,963,148,B2
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| 專利權人 |
國立虎尾科技大學 |
| 專利國家 |
美國, |
| 發明人 |
劉偉隆,張郭益,謝淑惠 |
| 應用領域 |
機械與機電自動化工程類 |
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專利商品特色：
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The present invention discloses a gas sensor made of field effect transistor based on ZnO nanowires (ZnO-FET) which operates according to the principle of metal-oxide-semiconductor field effect transistor (MOSFET) and has a charge carrier channel made of ZnO nanowires between source and drain. The gas sensor device disclosed in the present invention has three electrodes-gate, source and drain, so that it is different from the known gas sensor device which has only two electrodes-cathode and anode. The ZnO nanowires as charge channel in the gas sensor device of the present invention is an n-type semiconductor with high specific surface area, and its electric resistance can be controlled by the gate bias, so that the capability of the present device for sensing gas can be largely promoted.
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聯繫方式 |
| 聯絡人： 國立虎尾科技大學 產學合作處/智財組 王偉儒 |
 與我連絡 |
| 地址： 632雲林縣虎尾鎮文化路64號 |
電話： 05-631-5561 |
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