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雷射直寫式奈米週期性結構圖案製程設備 |
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 專利名稱 |
雷射直寫式奈米週期性結構圖案製程設備
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| 專利證書號 |
8,575,791
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| 專利權人 |
國立虎尾科技大學 |
| 專利國家 |
美國, |
| 發明人 |
覺文郁,沈金鐘,吳家鴻 |
| 應用領域 |
機械與機電自動化工程類 |
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專利商品特色：
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A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.
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聯繫方式 |
| 聯絡人： 國立虎尾科技大學 產學合作處/智財組 王偉儒 |
 與我連絡 |
| 地址： 632雲林縣虎尾鎮文化路64號 |
電話： 05-631-5561 |
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