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雷射直寫式奈米週期性結構圖案製程設備)(歐盟) |
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 專利名稱 |
雷射直寫式奈米週期性結構圖案製程設備)(歐盟)
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| 專利證書號 |
EP 2541323 B1
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| 專利權人 |
國立虎尾科技大學 |
| 專利國家 |
歐洲, |
| 發明人 |
覺文郁,沈金鐘,吳家鴻 |
| 應用領域 |
精密量測技術類 |
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專利商品特色：
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A manufacturing-process equipment has a platform assembly (10), a measurement feedback assembly (20) and a laser-working assembly (30). The platform assembly (10) has a base (11) and a hybrid-moving platform with a long-stroke moving stage (12) and a piezo-driven micro-stage (13). The base (11) has a mounting frame (111). The piezo-driven micro-stage (13) is connected to the long-stroke moving stage (12) and has a working platform (19). The measurement feedback assembly (20) is mounted securely on the platform assembly (10) and has a laser interferometer (21), a reflecting device (22) and a signal-receiving device (23). The laser-working assembly (30) is mounted on the platform assembly (10), is electrically connected to the measurement feedback assembly (20) and has a laser direct-writing head (31), a controlling interface device (32) and a positioning interface device (33).
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聯繫方式 |
| 聯絡人： 國立虎尾科技大學 產學合作處/智財組 王偉儒 |
 與我連絡 |
| 地址： 632雲林縣虎尾鎮文化路64號 |
電話： 05-631-5561 |
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